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Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces

12,000.00$

Ai RF500 series RF generators give you 500 watts of power and 13.56MHz frequency, they can accommodate up to 150mm OD tubes for you DIY PECVD (Plasma Enhanced Chemical Vapor Deposition) systems for plasma etching, plasma cleaning and plasma polymerization.

SKU: 4200439 Category: Tag:

Description

 Electrical requirements
 208-240 volts 50/60 Hz

 Output power
 5 to 500 watts, adjustable in /-1% step

 RF frequency
 13 MHz with /-0.005% stability

 Reflection power
 200 watts max.

 Matching
 Automatic

 RF output port
 50 Ω, N-type, female

 Cooling
 Air

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