Ai 500 Watts 13MHz RF Generator for Up To 150mm Tube Furnaces
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12,000.00$
Ai RF500 series RF generators give you 500 watts of power and 13.56MHz frequency, they can accommodate up to 150mm OD tubes for you DIY PECVD (Plasma Enhanced Chemical Vapor Deposition) systems for plasma etching, plasma cleaning and plasma polymerization.